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A co-authored study with Osaka University has been published in Applied Physics Express

Utilizing the “KRYSTAL Wafer”—a silicon substrate with a Pt/ZrO₂ buffer layer provided by I-PEX Piezo Solutions Inc.—we have successfully grown high-quality thin films of the strongly correlated oxide LaNiO₃ on a silicon substrate and demonstrated a technology that reversibly controls thermal conductivity through electrical manipulation. This study demonstrates that the superior epitaxial growth environment provided by the KRYSTAL Wafer enables the realization of advanced functionalities in LaNiO₃, opening up new technological possibilities for the development of thermal control devices.

Thermal Conductivity Control Technology Study

Received the Sputtering and Plasma Process Technology Committee Award

I-PEX Piezo Solutions Inc. received the Sputtering and Plasma Process Technology Committee Award 2024, which aims to award outstanding achievements that contribute to the development of sputtering and plasma process technology.

What is MEMS? (Detailed explanations with diagrams)

MEMS devices are already being used as electronic components in a wide range of fields, including the home appliances, automobiles, IoT products, telecommunications and medical products around us, and the use of MEMS is expected continue to expand in the future. This page provides a detailed explanation of MEMS, which use semiconductor processing technology commonly found in everyday products.

The World's Leading Piezoelectric Technology

By combining the plasma control technology cultivated through DLC deposition and inorganic crystal control technology, we have succeeded in single-crystallization of various piezoelectric materials, which were considered extremely difficult to produce, and established manufacturing methods. It can be adapted to various semiconductor processes and exhibits significantly higher properties than existing polycrystalline materials.

Mechanism of Single-Crystal Deposition Technologies

The key to KRYSTAL^® Wafer’s single crystal technologies is in the buffer layer, and the shape of zirconia in particular. A minute pyramid (nano-pyramid) structure grows regularly on the interface surface of platinum or zirconia.

Our piezoelectric MEMS foundry service supports the development of high-performance piezoelectric MEMS devices using our superior single-crystal piezoelectric deposition and MEMS processing technologies.
We offer flexible services such as buffer wafer supply, and specific MEMS processing to meet your requirements.