MEMS devices are already being used as electronic components in a wide range of fields, including the home appliances, automobiles, IoT products, telecommunications and medical products around us, and the use of MEMS is expected continue to expand in the future. This page we will explain in detail about MEMS, which utilize semiconductor processing technology most widely used in familiar products.

By combining the plasma control technology cultivated through DLC deposition and inorganic crystal control technology, we have succeeded in single-crystallization of various piezoelectric materials, which were considered extremely difficult to produce, and established manufacturing methods. It can be adapted to various semiconductor processes and exhibits significantly higher properties than existing polycrystalline materials.

The key to KRYSTAL^® Wafer’s single crystal technologies is in the buffer layer, and the shape of zirconia in particular. A minute pyramid (nano-pyramid) structure grows regularly on the interface surface of platinum or zirconia.