KRYSTAL^® Wafer

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Superior wafers for piezoelectric MEMS, that can be single-crystallize various piezoelectric materials to be deposited by using our original ZrO2 Buffer.

• Standard PZT KRYSTAL^® Wafers
• Multi-layer Single-Crystal PZT (2-layer) Wafer
• Aluminum Nitride (AlN) Thin Film Wafer

 

 

Standard PZT KRYSTAL^® Wafers

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• Standard wafer sizes: 4-inch, 6-inch, and 8-inch sizes

Single-Crystal PZT with Top Electrode Wafer

 

Single-Crystal PZT Wafer

 

Bottom Electrode SRO/Pt Wafer (SRO/Pt/ZrO₂)

 

Bottom Electrode Pt Wafer (Pt/ZrO₂)

 

ZrO2 Buffer Wafer (ZrO₂)

In addition to standard deposition on Si wafers, we also provide custom deposition services, such as deposition at different thicknesses, deposition on SOI wafers, and deposition on wafers supplied by customer.

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New Technology Developments

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• Multi-layer Single-Crystal PZT (2-layer) Wafer

Multiple layers of single-crystal PZT are deposited by applying superior deposition technology. Piezoelectric properties are improved, enabling high-power and high-precision actuator drive.
Learn More

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• Aluminum Nitride (AlN) Thin Film Wafer

Achieved AlN epitaxial growth on Si wafer using our unique ZrO2 buffer layer technology.
Learn More

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