Wafer Products (KRYSTAL® Wafer)

KRYSTAL Wafer

 

KRYSTAL® Wafer

Superior wafers for piezoelectric MEMS, that can be single-crystallize various piezoelectric materials to be deposited by using our original ZrO2 Buffer.

 

 

Standard PZT KRYSTAL® Wafers

    Standard KRYSTAL Wafer Product List
    • Standard wafer sizes: 6-inch, and 8-inch sizes

    Single-Crystal PZT with Top Electrode Wafer

    PZT with Top Electrode Wafer

     

    Single-Crystal PZT Wafer

    PZT Wafer

     

    Bottom Electrode SRO/Pt Wafer (SRO/Pt/ZrO2)

    Bottom Electrode SRO/Pt Wafer

     

    Bottom Electrode Pt Wafer (Pt/ZrO2)

    Bottom Electrode Pt Wafer

     

    ZrO2 Buffer Wafer (ZrO2)

    ZrO2 Buffer Wafer

    In addition to standard deposition on Si wafers, we also provide custom deposition services, such as deposition at different thicknesses, deposition on SOI wafers, and deposition on wafers supplied by customer.

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    New Technology Developments

    • Multi-layer Single-Crystal PZT (2-layer) Wafer

    2-layer PZT waferMultiple layers of single-crystal PZT are deposited by applying superior deposition technology. Piezoelectric properties are improved, enabling high-power and high-precision actuator drive.
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    • Aluminum Nitride (AlN) Thin Film Wafer

    AlN waferAchieved AlN epitaxial growth on Si wafer using our unique ZrO2 buffer layer technology.
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    Mechanism of KRYSTAL wafer