What is MEMS?
This page we will explain in detail about MEMS, which utilize semiconductor processing technology most widely used in familiar products.
Contents:
What is MEMS?
MEMS (Micro-Electro-Mechanical Systems) is systems that integrate mechanical structures and electronic circuits processed on micro scales.
Examples of typical MEMS devices include accelerometers, gyro-sensors, pressure sensors, micromirrors, inkjet printer heads, microphones and speakers.
These MEMS devices are often manufactured and assembled using semiconductor processing technology, using chips with integrated micro-mechanical structures and electronic circuits on wafers (MEMS chips).
MEMS are already being used as electronic components in a wide range of fields, including the home appliances, automobiles, IoT products, telecommunications and medical products around us, and the use of MEMS is expected continue to expand in the future.
MEMS and Semiconductor Technology
Widely used MEMS devices are manufactured using semiconductor technology in the similar way as IC chips. They are therefore both precisely manufactured on a very small scale. Specifically, advanced semiconductor processing methods such as deposition, photolithography and etching technologies are used.
The main reasons why semiconductor processing technologies are widely used in MEMS are that the semiconductor silicon substrates used in IC chips have excellent mechanical and electrical properties as a material for MEMS. Also, advances in IC technology have led to the development of silicon substrate microfabrication technology, integration technology, standardized mass production processes and the deployment of high-performance process equipment to enable these processes, which have greatly improved the precision, functionality, productivity and cost-efficiency of MEMS devices.
MEMS technology utilizes many of the manufacturing techniques and processes established by the IC technology, enabling increased productivity and cost reductions, resulting in the increased use and widespread adoption of MEMS in a wide range of industries.
*Some MEMS use a variety of processing technologies and materials other than semiconductor technology, such as micro-machining, 3D printing and polymer materials, as well as those that have no moving parts, such as optical waveguides and DNA chips.
Differences between MEMS and ICs
MEMS and IC have many similarities in terms of manufacturing methods and size reduction technology, yet there are significant differences in their functions, applications and operating principles. MEMS are systems related to physical movement and measurement, while IC are circuits that perform purely electronic signal processing. Both play an important role in modern technology and are used in applications that are suited to their specific characteristics.
IC consists of purely electronic circuits, which process and control electrical signals using transistors, capacitors and resistors, etc. IC is mainly used in electronic devices for logic calculations, signal processing, memory, etc.
MEMS, on the other hand, are systems that perform mechanical operations and physical measurements and consist of sensors and actuators (drive units). MEMS differ greatly in their applications, appearance, internal structure and size, depending on their use. Typical examples include acceleration sensors, pressure sensors, microphones and speakers.
If ICs specializing in information processing and memory functions can be compared to the human brain, then MEMS, which have various physical functions by combining mechanical movements and sensors, can be compared to the body's functions and sensory organs.
