[Under Development]

We are developing Multiple layers of single-crystal PZT (2-layer PZT) wafers by applying our superior deposition technology. Piezoelectric properties are improved, enabling high-power and high-precision actuator drive. Under development with 6 and 8-inch wafers.
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2-layer PZT wafer

2-layer PZT

Piezoelectric Properties for 1-layer and 2-layer PZT

Piezoelectric Properties

Please note: These data are subject to change due to improvements, etc.

Application example of 2-layer PZT (MEMS Mirror)

2-layer PZT application — Compared to 1-layer PZT, 2-layer PZT doubles* the optical angle
*Simulation example with the same input voltage

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