[Under development]

I-PEX Piezo Solutions is developing AlN epitaxial growth on Si wafer by applying our superior deposition technology.
Under development with 6 and 8-inch wafers. Please contact us for more details. Contact Us

 

 

Characteristics of AlN Thin Films

*Uniformity ±0.66% is special product. Please note: These data are subject to change due to improvements, etc.

 

Measuring Method for Piezoelectric Property d33

Please refer to the documentation for our piezoelectric property d33 measurement method.Download the d33 Measurement Method

 

Crystallinity of AlN Thin Films

Confirmed that the lattice constants were aligned and that the AlN crystal thin film was highly oriented and of high quality.

Please note: These data are subject to change due to improvements, etc.

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